Diamond-Like Carbon Coatings and Processes
Specifications
- Superhard amorphous carbon coatings (ta-C)
- Hydrophobic amorphous carbon coatings (ta-C:F)
- Nitrogen doped amorphous carbon coatings (ta-C:N)
- 20” / 50cm maximal substrate height
- Thickness range from < 1 µm up to 10 µm
- Coating of flat and cylindrical tools and components
- Coating of wafer substrates
- Coating of plastic substrates
Fabrication
These coatings are applied using a laser-arc equipped physical vapor deposition machine.
Applications
- Wear coatings for tools and components
- Wear coatings for engine parts
- Dry lubricant hard coating for machinery
- Easy release coatings for molds and dies
- Non-stick coating for forming tools
- Biocompatible coatings
- Optically transparent hydrophobic coatings for plastic materials
- Optically transparent hydrophobic coatings for solar cell protection
References
- L. Haubold, M. Becker, D. Packer, T. Schuelke , ta-C:X – Depositing doped superhard amorphous carbon films using the LaserArco PVD platform, Society of Vacuum Coaters, Proceedings 2008
- L. Haubold, T. Schuelke, H.-J. Scheibe, C. Kleemann, C. Hinueber, M. Baumann, R. Friedrichs, E. Hoefig , Diamond-like carbon coatings for biomedical implants, Society of Vacuum Coaters, Proceedings 2008
- T. Schuelke, T. Witke, H.-J. Scheibe, P. Siemroth, B. Schultrich, O. Zimmer and J. Vetter, Comparison of DC and AC arc thin film deposition techniques, Surface and Coatings Technology 120-121 (1999) 609-613
- T. Witke, T. Schuelke, J. Berthold, C.F. Meyer and B. Schultrich, Deposition of hard amorphous carbon coatings by laser and arc methods, Surface and Coatings Technology 116-119 (1999) 609-613
- H.-J. Scheibe, B. Schultrich, H. Ziegele and P. Siemroth, “Deposition of superhard amorphous carbon films by pulsed arc sources,” IEEE T Plasma Sci, 25(4), pp. 685-688, 1997
