CVD Diamond Coatings and Processes
Specifications
- Coating on silicon wafer substrates
- Coating on metal substrates (niobium, titanium, tungsten)
- Wafer size: up to 8”
- Materials: nano crystalline and polycrystalline diamond
- Deposition temperatures: > 500°C
- Doping: boron doped and un-doped
- Polishing
Fabrication
Diamond synthesis is performed in microwave plasma assisted chemical vapor deposition reactors.
Applications
- Substrates for the fabrication of micro-electromechanical systems (MEMS)
- Optical and electronic substrates
- Thermal management
- Electrochemical electrodes
- Electrochemical analysis
References
- J. Asmussen, T. A. Grotjohn, T. Schuelke, M. F. Becker, M. K. Yaran, D. J. King, S. Wicklein, D. K. Reinhard, Multiple substrate microwave plasma-assisted chemical vapor deposition single crystal diamond synthesis, Applied Physics Letters 93,1 2008
- R. Ramamurti, M. Becker, T. Schuelke, T. Grotjohn, D. Reinhard and J. Asmussen, Synthesis of boron-doped homoepitaxial single crystal diamond by microwave plasma chemical vapor deposition, Diamond and Related Materials, 17 (2008) 1320-1323
- D. T. Tran, T. A. Grotjohn, D. K. Reinhard, J. Asmussen, Microwave plasma-assisted etching of diamond, Diamond & Related Materials, 17 (2008) 717-721
- D. King, M.K. Yaran, T. Schuelke, T.A. Grotjohn, D.K. Reinhard and J. Asmussen, Scaling the microwave plasma-assisted chemical vapor diamond deposition process to 150-200 mm substrates, Diamond and Related Materials, 17 (2008) 520-524
- R. Ramamurti, M. Becker, T. Schuelke, T. Grotjohn, D. Reinhard, G. Swain and J. Asmussen, Boron doped diamond deposited by microwave plasma-assisted CVD at low and high pressures, Diamond and Related Materials, 17 (2008) 481-485
- S. S. Zuo, M. K. Yaran, T. A. Grotjohn, D. K. Reinhard, J. Asmussen, Investigation of diamond deposition uniformity and quality for freestanding film and substrate applications, Diamond & Related Materials 17 (2008) 300 – 305
- S. Ahmed, R. Liske, T. Wunderer, M. Leonhardt, R. Ziervogel, C. Fansler, T. Grotjohn, J. Asmussen and T. Schuelke, Extending the 3ω-method to the MHz range for thermal conductivity measurements of diamond thin films, Diamond & Related Materials 15 (2006) 389 – 393
- W. S. Huang, D. T. Tran, J. Asmussen, T. A. Grotjohn, D. Reinhard, Synthesis of thick, uniform, smooth ultrananocrystalline diamond films by microwave plasma-assisted chemical vapor deposition, Diamond & Related Materials 15 (2006) 341-344
- T. Grotjohn, R. Liske, K. Hassouni, J. Asmussen, Scaling behavior of microwave reactors and discharge size for diamond deposition, Diamond & Related Materials 14 (2005) 288-291
