Diamond Plates
Specifications
- Freestanding diamond plates with a thickness exceeding 10 µm
- Polycrystalline diamond
- Thickness of several tens to several hundreds of micrometers
- Up to 100 mm in diameter
- Lapping and polishing post-processing
- Laser cutting post-processing
Fabrication
The diamond material is synthesized by microwave plasma assisted chemical vapor deposition. Process parameters a varied as to achieve the desired properties and uniformity of the deposition over the desired substrate area.
Applications
- Optical windows for high power lasers
- X-ray windows
- Terahertz windows
- Electron beam windows
- Thermal management, heat spreaders
- Biomedical electrodes
- Substrates for chemical reactions and analysis
- Substrates for the fabrication of micro-electromechanical systems (MEMS)
References
- S. S. Zuo, M. K. Yaran, T. A. Grotjohn, D. K. Reinhard, J. Asmussen, Investigation of diamond deposition uniformity and quality for freestanding film and substrate applications, Diamond & Related Materials 17 (2008) 300 – 305
